SRD (Spin Rinse Dryer) infrared lamp

Fri, 03 Jul 2026 15:22:37 +0800

On the fab floor, the SRD cycle is where yield can get away from you in a heartbeat. A lamp that’s even slightly off starts leaving watermarks, spiking particle counts, and pushing good material into scrap. We built our SRD infrared lamp to kill that variability where it lives. What matters under the hood It runs short-wave infrared emitters with quartz optics, dumping energy straight into the rinse and dry phase. Thermal uniformity across the chamber stays within ±0.1°C, so every wafer gets the same thermal budget. Setpoint changes land in under 200 ms, giving you tight control without overshoot. It’s cleanroom-compatible from Class 1 to Class 100. The housing is sealed, and the emitter path is laid out so it won’t shed particles. Output stays stable for 5,000+ hours, with intensity drift under 5%. Why it holds up in SRD In SRD, you’re chasing consistent drying without stressing photoresist or damaging patterns. The lamp’s fast ramp keeps the temperature profile inside spec, so resist integrity stays intact after soft bake and hard bake traces. You end up with repeatable dry-down, lower defect density, and fewer rework lots. Power use drops because the emitters hit setpoint quickly and hold it cleanly, so you don’t dump waste heat into the process chamber. Uptime improves too—the driver is built for 24/7 operation, and the lamp assembly is engineered for long life. The details that make it work The lamp fits standard SRD footprints, but integration has to match your tool geometry, airflow, and the emissivity of the chamber walls. Double-check the mounting interface and the thermal load on your chiller loop; if cooling doesn’t line up, uniformity drifts. Plan on a short burn-in and qualification run to lock the recipe to your wafer stack and line conditions.

(Spin on Direct Infrared Heating Supply

SRD (Spin Rinse Dryer) infrared lamp