Quartz sleeve for fab IR lamp

Wed, 17 Jun 2026 16:36:37 +0800

On the fab floor, photoresist bake is a thermal budget you just can’t miss. A 2°C drift in soft bake or hard bake will move your critical dimensions, and that’s when the line stops. We built this quartz sleeve for fab IR lamps to keep the thermal profile locked in, shift after shift. What matters under the hood The sleeve is made for short-wave IR transmission, so it responds fast and holds tight control. It keeps wafer-level uniformity at ±0.1°C across the bake surface, which means every photoresist layer sees the same temperature. Cleanroom compatibility is baked into the design: the material and finish hold particle generation at zero, so you can run Class 1–100 environments without losing uptime. You get repeatable bake profiles, consistent reflectivity, and stable output that holds up over thousands of hours. Why it plays in lithography In lithography, temperature sets linewidth, adhesion, and defect density. This sleeve stabilizes the bake window, cuts scrap, and shortens qualification cycles. You’ll use less energy because the system hits setpoint quickly and holds it with minimal oscillation. Reliability is built for 24/7 operation, which translates to fewer lamp swaps, fewer alarms, and maintenance windows you can actually plan around. What you need to keep straight Installation demands exact lamp alignment and the right connector match to your tool; a mismatch will create hot spots and cut life short. Confirm chamber geometry and voltage rating before you retrofit. Handle it with clean protocols so you don’t introduce micro-scratches that can affect transmission. Schedule periodic inspections that line up with your preventive maintenance.

Sleeve on Direct Infrared Heating Supply

Quartz sleeve for fab IR lamp