Post cleaning wafer infrared heater

Tue, 23 Jun 2026 01:16:04 +0800

On the line, you can do everything right up to post-cleaning and still bleed yield if the wafer dries unevenly or the bake drifts. Temperature nonuniformity shows up as watermarks, skinning, and edge bead. We built our post-cleaning wafer infrared heaters to shut those failure modes down, with repeatable thermal control right where it counts—on the wafer surface. What matters technically We run short-wave infrared with fast response and tight spectral control, matched to how water and photoresist absorb. That gives wafer-level uniformity within ±0.1°C across 150–300 mm substrates. Temperature repeatability holds at ±0.2°C shot-to-shot, so the steps that can’t tolerate drift—soft bake, hard bake, and post-cleaning drying—stay inside the thermal budget. The platform is built for cleanroom Class 1–100, with a particle-controlled design that doesn’t add particles during operation. Why it works in practice In post-cleaning, IR penetrates micro-features and drives off moisture without skinning, so you get immediate, residue-free drying. In lithography, the same platform stabilizes soft bake temperature, giving you repeatable solvent removal and film profile, then you can switch over to hard bake for solid curing. The fast ramp cuts cycle time, and tighter setpoints mean less scrap and rework. Energy use stays sensible, too—you heat the wafer, not the chamber. Here is what to plan for on install. You need to get the tool interface and exhaust routing right so cleanroom pressure and temperature stay stable. The heaters speak standard SECS/GEM, but if you’re dropping them into a legacy platform, expect a custom bracket and a calibration routine. Plan a short qualification run to map emissivity and confirm uniformity against your specific film stack.

Post on Direct Infrared Heating Supply

Post cleaning wafer infrared heater